摘要
介绍了KINGSEMI封闭式晶片处理系统。它是满足深亚微米光刻工艺要求的Cluster结构。有占地小,采用空气过滤(MFC)及气流导向穴FFU雪等控制系统,对局部环境进行温湿度控制等优点;智能型化学品自动供应站精确地控制光刻胶、显影液等化学试剂的用量。片盒站机械手和工艺单元机器人联合传送晶片,准确、安全、快捷;备有容纳4个片架盒的片盒站,可同时处理两种不同尺寸的晶片。嵌入式控制软件,WindowsNT操作系统,构成良好的人机界面熏操作方便。
The text introduces Kingsemi wafer processing system that is cluster type and is used in the deep sub-micrometer of lithography. Its floor-space is small and easer to control temperature and humidity in the partial environment with MFC and FFU. Intelligence chemical auto supply station can precisely control the consumed amount of PR and developing liquid and so on . The cassette station robot and process unit robot quickly, reliably and exactly transfer wafers. There is an enough room for 4 cassettes in the cassette station, so two sizes of wafers are processed in the cluster simultaneously. Embedded software and Window NT make up a friendly man-machine interface, It is easy to operate the system.
出处
《电子工业专用设备》
2004年第4期70-73,共4页
Equipment for Electronic Products Manufacturing
