透明材料飞秒激光三维微制备

Three-dimensional microfabrication in transparent materials with femtosecond laser pulses

利用飞秒激光对透明材料进行改性和加工,制备三维微结构和器件受到极大的关注。本文介绍了在透明材料内部或表面进行微制备的方法和应用,包括利用飞秒激光诱导的折射率变化来制作光波导、光栅和耦合器等;利用材料内部的微爆炸实现三维点存储和其它三维点阵结构等;通过界面的烧蚀过程进行打孔、切割和刻蚀等;利用双光子聚合制备微透镜、光子晶体和衍射光学元件等等。

Fabrication of three-dimensional microstructures and microdevices based on femtosecond laser modification and machining of transparent materials has attracted much attention. Microfabrication techniques and their applications are introduced, including femtosecond laser induced refractive index change for fabrication of optical waveguides, gratings and couplers; microexplosion inside materials for three-dimensional bit-oriented storage and other dot-arrayed structures; interface ablation for drilling, cutting and etching; two-photon polymerization for microlens, photonic cryatals and diffractive optical elements.