摘要
利用飞秒激光对透明材料进行改性和加工,制备三维微结构和器件受到极大的关注。本文介绍了在透明材料内部或表面进行微制备的方法和应用,包括利用飞秒激光诱导的折射率变化来制作光波导、光栅和耦合器等;利用材料内部的微爆炸实现三维点存储和其它三维点阵结构等;通过界面的烧蚀过程进行打孔、切割和刻蚀等;利用双光子聚合制备微透镜、光子晶体和衍射光学元件等等。
Fabrication of three-dimensional microstructures and microdevices based on femtosecond laser modification and machining of transparent materials has attracted much attention. Microfabrication techniques and their applications are introduced, including femtosecond laser induced refractive index change for fabrication of optical waveguides, gratings and couplers; microexplosion inside materials for three-dimensional bit-oriented storage and other dot-arrayed structures; interface ablation for drilling, cutting and etching; two-photon polymerization for microlens, photonic cryatals and diffractive optical elements.
出处
《量子电子学报》
CAS
CSCD
北大核心
2004年第2期188-193,共6页
Chinese Journal of Quantum Electronics
基金
国家重大基础研究项目(973)TG1999075207
国家基金委项目(90206003
90101027)
关键词
飞秒激光
透明材料
三维微制备
微爆炸
双光子聚合
laser techniques
femtosecond laser
three-dimensional microfabrication
transparent material