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脉冲激光烧蚀金属氧化物的物理化学过程及反应机理 被引量：4

Physical and chemical processes and mechanism of pulsed laser ablation of metal oxides
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摘要 本文回顾了前人有关脉冲激光烧蚀过程的各种理论模型,重点综述了脉冲激光烧蚀金属氧化物的物 理化学过程及反应机理,并对激光能量不很高时金属氧化物的烧蚀过程提出了热控制机制的新观点。 Previous works on the theoretical models of pulsed laser ablation were summarized. Our recent studies of the physicochemical processes and mechanisms for pulsed laser ablation of metal oxides were briefly reviewed. A novel thermal-controlling mechanism was proposed for the pulsed laser ablation of metal oxides when the laser fluence was not very high.
作者 党海军 秦启宗
机构地区 西北核技术研究所 复旦大学化学系激光化学研究所
出处 《量子电子学报》 CAS CSCD 北大核心 2004年第2期216-223,共8页 Chinese Journal of Quantum Electronics
关键词 脉冲激光 烧蚀 金属氧化物 反应机理 热控制 laser techniques pulsed laser ablation ablation mechanism metal oxides
分类号 TN305.2 [电子电信—物理电子学]
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参考文献36

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同被引文献25

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量子电子学报
2004年 第2期

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