摘要
利用磁控溅射法在SiC纤维上沉积Ti-6Al-4V涂层制备成先驱丝.在功率密度一定时,沉积速率和工作气压有关.环境温度对涂层表面形貌及涂层与纤维结合的影响较大.涂层成分接近Ti-6Al-4V,沿涂层厚度方向成分分布均匀.涂层中柱晶晶粒尺寸为20-50 nm,为α-Ti固溶体.
The effects of sputtering parameters on the microstructure of Ti-6Al-4V coating on SiC(f) prepared by magnetron sputtering were studied. The results show that the deposition rate is related to the working pressure at a given power density. The morphology of the deposited layer and its binding with the fibre are dependent on temperature. The composition of the coat is close to Ti-6Al-4V, and is uniform throughout the thickness of the coat. The deposited layer consists of crystallites with nonequilibrium hep structure with grain size of 20-50 nm. The interface between SiC fibre and Ti-6Al-4V coating was investigated by scanning electron microcopy and energy dispersive X-ray spectroscopy. The examination reveals no chemical reaction at the fibre-coat interface which is in nature a sharp interface formed by bonding of the two substances.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
2004年第4期359-362,共4页
Acta Metallurgica Sinica
