摘要
为研究现代干涉技术的应用,提出一种测量绝对长度和位移大小的白光干涉中零光程差位置测量方法.在测量中以双光束干涉条纹间距的四分之一大小为采样间隔,以四步测量法作为数据处理方法确定干涉条纹的局部调制度.采用重心法确定干涉条纹调制度的最大值位置,并以此作为零光程差位置.对光电测量系统中的机械精度与光电测量精度对测量结果的影响进行了定量计算.使用本方法,在1%的光强测量精度下可达到10nm的位置定位精度.
In order to study the application of modern interfering technology,the method for measuring the zero light path difference in white light interfering in the application of absolute length or displacement measurement is given in this paper. The local modulation of fringes is gotten by using one fourth of the fringes period length as the sampling step and by using the four-step method as the experiment data processing method. The weight center method is used to define the position with maximum modulation of fringes, which is also the position with zero light path difference. The effect of the machinery precision and the transform precision in the optoelectronic measurement system is calculated. When the method given in this paper is used,the position precision can reach up to 10 nm under 1% precision for light intensity measurement.
出处
《天津大学学报（自然科学与工程技术版）》
EI
CAS
CSCD
北大核心
2004年第4期363-367,共5页
Journal of Tianjin University：Science and Technology
基金
国家自然科学基金资助项目(60072023).
