摘要
根据椭偏消光法和光度法原理,研制成功一台消光法和光度法兼容的自动椭偏测厚仪。本文介绍椭偏光度法的测量原理和仪器的测量过程及方法,并详细给出仪器测量精确度的实验研究结果。
Based on the principle of null and photometric ellipsometry,an automatic ellipsometer has been developed.The paper introduces the principle of photometric ellipsometry and the working process and method of the ellipsometer.The results of expeimental study on the repeatability and accuracy of the ellipsometer have been gived in detail.
出处
《机电工程技术》
2004年第4期18-20,共3页
Mechanical & Electrical Engineering Technology
基金
广东省工业攻关基金资助项目(C60109)
关键词
椭偏仪
消光法
光度法
膜厚
精确度
Ellipsometer
Null method
Photometric method
Film thickness
Repeatability and accuracy
