热处理对Y_2O_3:Eu荧光薄膜结晶性能的影响

Crystal property of Y_2O_3:Eu thin film improved by post-deposition heat treatment

运用热处理方法对电子束蒸发制备的Y2O3:Eu荧光薄膜进行不同条件下的退火处理.用X射线衍射等手段表征Y2O3:Eu荧光薄膜的成分、结构、表面形貌.实验表明随着温度的升高,薄膜的结晶状况得到改善,提高了薄膜的结晶性能.

Y_2O_3:Eu thin films ,which have been grown on ITO substrated by electron beam evaporation, are annealed in different conditions. The construction and ingredient of the Y_2O_3:Eu thin films are used X-ray diffraction and XPS. It was found that the post-deposition annealing at 400℃ and 600℃ improved the crystal properties of Y_2O_3:Eu thin films respectively.