摘要
光学薄膜领域应用反应磁控溅射技术已有多年,反应磁控溅射对提高薄膜质量及降低工艺成本的作用,已受到业界的重视,正在进入工业生产之中。对光学薄膜领域中反应磁控溅射技术中的相关问题进行了评述,提出了一种可能的方案。
Reactive magnetron sputtering (RMS) has been applied in the field of optical coating for many years.A lot of attention has been paid by optical coating manufacutures on RMS due to its function of enhancing the quality of optical thin films with lower cost.RMS is now entering industrial production. The paper describes some progress in RMS and shows a possible strategy for rebuild an old-version evaporation coater to a RMS plant.
出处
《光学仪器》
2004年第2期109-114,共6页
Optical Instruments
