激光薄膜缺陷研究

Study on defects in optical thin film

薄膜缺陷是影响薄膜元件抗激光损伤的重要因素之一,长期以来一直是人们关注和研究的问题。首先介绍了薄膜缺陷的种类、特点及成因。在此基础上,分析了缺陷对激光损伤阈值的影响以及激光预处理对缺陷的影响。最后,对于如何减少缺陷和提高损伤阈值作了讨论。

Defects in thin film are one of the most important factors influencing laser-induced damage in the thin film components, and always a major concern. Firstly,category, properties and derivation of defects in thin film are introduced . Then, the influence of defects on laser-induced damage and the influence of laser conditioning on defects are analyzed. And finally, the ways to diminish defects and increase laser damage thresholds are also discussed.