PCVD法沉积Ti(CN)涂层及其抗氧化性研究

Study of Ti(CN) Layer and Anti-oxidation Property Deposited by PCVD

应用 PCVD技术 ,以金属有机物 TPT作钛源在 H13模具钢表面沉积 Ti(CN)涂层 ,研究了不同工艺参数对涂层组织和性能的影响 ,并对涂层的抗氧化性进行了试验。结果表明 ,采用适当的沉积温度、压力及氮气流量 ,可以在 H13钢表面得到以 Ti(CN )为主的致密涂层 ,在沉积温度 5 0 0℃时达到最高硬度 HV 176 0 ,涂层在 6 0 0℃以下具有良好的抗氧化性。

Using organic-metallic compound TPT as the source of Ti , H13 mould steel was coated Ti(CN) layer by PCVD technique,the effects of coating technics on the structure and micro-hardness and the anti-oxidation property of Ti(CN) layer were investigated. The results show that under the appropriate temperature, pressure and N 2 flow, one layer mostly of Ti(CN) was formed on the steel surface which has highest micro-hardness HV1760 at 500 ℃,and the anti-oxidation property of the layer was significant below 600 ℃.