硅微型机械振动陀螺仪的计算机辅助设计

Computer-aided design of silicon micromachined vibratory gyroscope

建立了硅微型机械振动陀螺仪的优化模型 ,确定其结构参数的目标函数和约束条件 ,采用优化方法对结构参数进行优化计算 .以AutoCAD为支撑软件 ,采用ActiveXAutomation技术对AutoCAD进行二次开发 ,建立了硅微型机械振动陀螺仪的计算机辅助设计系统 (GYROCAD) .该系统可以根据陀螺仪的性能指标等确定陀螺仪的最优结构参数 ,设计实例表明 ,由该系统设计的硅微型机械振动陀螺仪的灵敏度得到了明显的提高 .

The optimized model of silicon micromachined vibratory gyroscopes is established, which confirms the target function and the restriction of structural parameters of gyroscopes, and the structural parameters of gyroscopes are optimized with the optimization design. A computer aided design system of silicon micromachined vibratory gyroscopes (GYROCAD) is developed by means of AutoCAD software and ActiveX Automation technology. The optimized parameters can be decided according to the performance of gyroscope, and the example indicates the design result of GYROCAD is better than original design.