压电式微位移补偿机构

Research of a Micro-Displacement Compensation Mechanism Based on Piezoelectric Actuator

设计了一种压电式微位移补偿机构,采用压电陶瓷作为微位移驱动器,柔性铰链为导向机构,对传统电机驱动的丝杠螺母进给工作台运动位置进行自动补偿,实现了工作台二次精密定位,提高工作台的定位精度。设计的柔性铰链微位移放大器,可使工作台定位精度达0.01μm,满足许多精密、超精密加工场合需要。

A kind of micro-displacement compensation mechanism driven by piezoelectric ceramic (actuator is) researched and designed. Adopting the actuator as the micro-displacement driver and a flexible joint as the guiding device, this mechanism compensates the moving position of the traditional lead-screw driven of working table machine tools automatically and realizes the secondary precise (positioning). In this paper, a kind of flexible joint is designed, the working table can be positioned to 0.01 μm, which meets the need of many high precision and super-high precision manufacturing fields.