摘要
在纯水制造过程中,以前常常使用鼓风脱气和真空脱气装置,近年来,膜脱气工艺发展非常迅猛,在高纯水领域已经开始有了广泛应用,同时也有不少纯水工艺采用了树脂催化法除氧。本文分别对五种不同的脱气装置作了介绍和对比。
The forced draft decarbonator and the vacuum degasification column are often used to deaerate inpure water process before. But the membrane deaeration process develops very fast recently. And it has beenused in ultrapure water area. However, catalyst column is used to deoxygen in many pure water process. Theintroduction and comparision about them are discussed here'in.
出处
《电子与封装》
2004年第2期54-62,30,共10页
Electronics & Packaging
