静电驱动微机电数模转换器的结构设计

Structure Design of the Electrostatic MEMDAC

由于静电驱动具有结构简单、响应时间短和功耗小等优点,在微执行器中得到了广泛的应用。随着应用范围的不断扩大,实际使用中对微执行器的精度和稳定性提出了越来越高的性能要求,使得传统的模拟电压驱动方式逐渐向数字电压驱动转移以满足这些要求。基于传统的静电驱动方式,提出了一种全新的纵向数字电压驱动方式,以期得到高精度、高稳定性的驱动源。根据这一思想,在传统的悬臂梁结构的基础上,采用条状电极,实现了微机电数模转换器(MEMDAC)的结构设计,并借助ANSYS软件完成了结构分析与模拟,证明了设计的可行性。

The electrostatic drive mechanism is the most popular and standard design of microactuators due to its simplicity and improved range of linearity. Nowadays accurate control of the actuator is required to maintain high performance in the overall system. But microactuators driven by the analog voltage cannot satisfy this requirement. This paper discusses a novel electrostatic microactuator driven by the digital voltage. The device is based on a cantilever beam actuator, with electrode strips on the beam, to implement the MEMDAC. Using ANSYS we complete the analysises and simulations of the structure and prove the feasibility of the design.