摘要
用微电子技术工艺研制的生物光电分析芯片可以对DNA进行流动分析。芯片上包括荧光检测器、电阻加热器和温度传感器。其中,荧光检测器是由一排NPN型硅光电三极管组成的,检测的荧光波长为700nm。为了提高光电管的响应灵敏度,三极管的BC结面积设计得较大,用硼离子注入制成浅PN结。为了防止等离子刻蚀引线孔时损伤硅层,采用了先蒸铝刻出压焊电极后,淀积增透膜再刻出电极的工艺。该芯片参数符合应用要求。
The Bio-photoelectric chip developed with microelectronics techniques for analyzing flow DNA liquor is introduced. This chip includes a photoelectric measuring apparatus, a resistance heater and a temperature sensor. The photoelectric measuring apparatus is composed of a array of NPN silicon photo transistor. The wavelength of measured light is 700nm. To enhance the sensitivity of photo transistor, the bigger and shallow BC junction was made through injecting B ion in it. To avoid damaging the surface of silicon, the Al electrode has been first made before deposit light struck membrane.
出处
《传感器世界》
2004年第3期21-23,共3页
Sensor World
