摘要
随着科学技术的发展 ,能谱分析技术在科研中的作用越来越重要。本文以KevexSIGMATM X射线能谱仪为例 ,论述了能谱的形成和原理 ,以及定性和定量分析技术 。
With the development of science and technology, the action of the analytic technology of energy spectrum becomes more and more important in the study of science. In this paper, we discuss the formation and principle of energy spectrum in Kevex SIGMA TM X-ray energy dispersive spectrometer, and also discuss the qualitative and quantitative analysis. The perspective development of the X-ray energy dispersive spectrometer is given.
出处
《现代科学仪器》
2004年第1期58-59,共2页
Modern Scientific Instruments
关键词
X射线
能谱
扫描电镜
定性定量分析
X-ray
energy spectrum
SEM
qualitative and quantitative analysis