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一种适合微条气体室探测器的理想衬底材料

A Suitable Material for the Substrate of Micro-Strip Gas Chamber
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摘要 微条气体室 (Micro stripGasChamber,MSGC)探测器最严重的问题是电荷积累效应 ,通过选择合适的衬底材料可以有效的避免 .为此 ,D2 6 3玻璃上沉积类金刚石 (Diamond likeCarbon ,DLC)膜来进行表面改性 ,从而制备DLC膜 D2 6 3玻璃双层结构作为MSGC衬底 .拉曼光谱说明DLC膜是由sp3 (σ键 )和sp2 (π键 )杂化碳原子组成 ,属于电子导电型材料 ,并且沉积出的是一种高质量的DLC膜 ;I V曲线表明DLC膜改性后的样品具有非常稳定和理想的电阻率 ,其值在 10 9— 10 12 Ω·cm间 ;C F曲线显示改性后样品具有小而稳定的电容 .DLC膜 D2 6 3玻璃的优良性能正是MSGC衬底的最佳要求 ,这种新型材料用作衬底将有效克服电荷积累效应和衬底不稳定性 . Micro-strip Gas Chamber (MSGC) used as a position sensitive detector has perfect performances in the detection of nuclear irradiations. However, it encounters a severe problem, that is, positive charge accumulation which can be avoided by reducing the surface resistivity of insulating substrate. So, diamond-like carbon (DLC) film is coated on D263 glass to modify its electrical properties as substrate for MSGC. Raman spectroscopy demonstrates that DLC film is of sp 3 (σ bonding) and sp 2 bonding (π bonding), and therefore it is a type of electronically conducting material. It also reveals that the film deposited on D263 glass possesses very large of sp 3 content and consequently is a high quality DLC film. I-V plots indicate that samples with DLC film enjoy very steady and suitable resistivities in the range of 10 9—10 12Ω·cm. C-F characteristics also show that samples coated by DLC film have low and stable capacitance with frequency. These excellent performances of the new material, DLC film/D263 glass, meet the optimum requirements of MSGC. DLC film/D263 glass used as the substrate of MSGC should effectively avoid the charge pile-up effect and substrate instability and then improve its performances.
出处 《高能物理与核物理》 CSCD 北大核心 2004年第4期408-411,共4页 High Energy Physics and Nuclear Physics
基金 国家自然科学基金 ( 60 0 72 0 3 3 )资助~~
关键词 微条气体室探测器 类金刚石膜 电荷积累效直 电子导电型材料 衬底材料 拉曼光谱 高能物理实验 MSGC detector, DLC film, electronically conducting material, charge pile-up effect
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参考文献13

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