溶胶-凝胶法制备LiCoO_2薄膜的研究

A Study of Synthesis of LiCoO_2 Thin Films by Sol-gel Method

以 Li NO3和 Co( NO3) 2 为主要原料、采用溶胶 -凝胶旋涂法在 ( 1 1 1 )单晶硅片上制备了 Li Co O2 薄膜 . X射线衍射结果表明 ,涂液中 Li+ 离子和 Co2 + 离子的总浓度与配比可影响薄膜的成分 .薄膜的最佳烧结温度与最佳烧结时间分别为 60 0～ 70 0℃和 3 0～ 60 min.涂液中柠檬酸、聚乙烯乙二醇。

Layered LiCoO 2 thin films were synthesized on the substrates of monocrystalline silicon(111) wafers by sol-gel and spin-coating methods. LiNO 3 and Co(NO 3) 2 were used as raw materials. XRD results show that the total concentration of metal ions(Li ++Co 2+) and the metal atomic ratio n(Li)/n(Co) in the coating solution can affect the composition in the films severely, and the best annealing temperature and time are between 600—700 ℃ and 30—60 min, respectively. Meanwhile, the contents of PEG, citric acid and deionized water in the coating solution and the speed of rising temperature have influence on the surface morphologies of the films strongly.