摘要
分析了定向耦合器几个参数的相互关系,设计了钛扩散铌酸锂定向耦合器的仿真方案,用BPM软件对不同耦合间距的定向耦合器对工艺的容差进行了模拟计算,得到了几种耦合间距/串音变化的组合。
Several parameters of the directional coupler have been analyzed. An
experimentation about a Ti: LiNbO_2 directional coupler has been planned. The process tolerance
for the directional coupler with different coupling distance has been simulated by using BPM
software, and a family of data about the variation of crosstalk with coupling distance have been
got.
出处
《半导体光电》
CAS
CSCD
北大核心
2004年第2期105-107,共3页
Semiconductor Optoelectronics
关键词
定向耦合器
串音
铌酸锂
光波导
directional coupler
crosstalk
LiNbO_3
optical waveguide
