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压强对射频溅射氧化锌薄膜结构和性能的影响 被引量：3

Effect of Deposition Pressure on the Structure and Properties of R.F Sputtering Zinc Oxide Film
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摘要 采用射频溅射方法在聚脂 (PET)胶片上沉积ZnO∶Al薄膜 ,实验结果表明沉积压强对氧化锌透明导电薄膜的表面形貌、结构、光电性能等有较大的影响 ,在低的沉积压强下薄膜具有很好的(0 0 2 )结构 ,有优良的光、电综合性能。同时详细讨论了影响结构和性能的诸因素。 R.F sputtering method is employed to deposit ZnO:A1 film on PET flake in this paper,The experiment results show that the deposition pressure has great influence on the surface morphology, structure, electric and optical properties of Zinc Oxide transparent conductive film.The film prepared in low pressure has perfect (002) texture and good optical and electric properties. Then we discuss the cause that influent the structure and properties of the film.
作者 苏伟涛 余志明 刘昕 杨莉
机构地区 中南大学湖南长沙
出处 《湖南有色金属》 CAS 2004年第2期24-26,55,共4页 Hunan Nonferrous Metals
关键词 氧化锌 透明导电 射频溅射 Zinc Oxide transparent conductive R.F sputtering
分类号 TG146.13 [金属学及工艺—金属材料]
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参考文献10

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二级参考文献2

共引文献16

同被引文献29

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湖南有色金属
2004年 第2期

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