摘要
在振镜和f -q 线性扫描物镜构成的线性扫描机构中,f -q 物镜的设计、加工误差会引起一定的非线性扫描误差,影响扫描成像的质量。为了检测f -q 物镜的非线性扫描误差,使用基于线阵CCD的检测电路和扫描光点位置检测算法进行了实验研究,得到了可用于校正的扫描光点位置以及振镜摆角的对应关系曲线和f -q 物镜的非线性扫描误差曲线。
In a linear scanning mechanism constituted by polarization filter and f-theta linear scanning objective, the design and processing errors of f-theta objective can cause some nonlinear scanning errors and affect scanning imaging quality. In order to measure nonlinear scanning error of the f-theta objective, an experimental study is carried out by using detection circuit based on linear CCD and a scanning spot position detection algorithm. In this way the corresponding relation curve between scanning spot position vs. polarization filter tilt angle and nonlinear scanning error curve of f-theta objective are obtained, and these curves can be applied to calibrating nonlinear scanning error.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2004年第4期9-12,共4页
Opto-Electronic Engineering
基金
国家自然科学基金项目(30227002)
