一种新的铁电薄膜快速热处理工艺的研究

STUDY ON A NEW AND RAPID HEAT-TREATMENT PROCESS FOR FABRICATING LEAD ZIRCONATE TITANATE THIN FILM

使用一种新的快速热处理的方法制备出Pb(Zr0 .52 Ti0 .48)O3 (PZT)薄膜 ,该方法的主要设备为链式热处理炉 ,它主要分为三部分 ,即预热带、加热带和冷却带 .溶胶的配制采用先通过减压蒸馏的方法得到干凝胶 ,再将干凝胶溶解在乙二醇甲醚中的方法得到 .对干凝胶作了DSC TG分析 ;对薄膜作了X 射线衍射分析 ,结果为纯的钙钛矿结构的晶相 ;在 10kHz时薄膜的相对介电常数为 2 35 ,介质损耗小于 0 .0 2 ;C V特性曲线以及P E电滞回线显示薄膜具有良好的铁电性能 .

A new and rapid heat-treatment process for fabricating lead zirconate titanate, Pb(Zr0.52Ti0.48)O-3(PZT), ferroelectric thin films was developed. The main equipment of this heat-treatment process is termed caterpillar furnace. The furnace is composed of three parts, including preheating, heating and cooling. The precursor solution were prepared by using a modified sol-gel process, in which solid precursors of PZT were prepared through reduced pressure distillation first, and then the precursor was dissolved in 2-methoxyethanol(2-MOE) to form the sols for the spin-coating deposition. The precursor was investigated by DSC-TG, and the PZT thin film was investigated by XRD. XRD analysis shows that the thin film possesses single-phase perovskite-type structure. A dielectric constant and loss tangent of thin film were 235 and 0.02 at 10KHz, respectively. The capacitance-voltage(C-V) and Hysteresis loops of PZT films show that the films possess fine ferroelectric properties.