用电子显微镜剖析存储器器件

Application of electron microscopy in analyzing memory device

简要介绍了扫描电镜(SEM)和透射电镜(TEM)两种当前主要的电子显微分析工具在存储器器件分析过程中的应用,讨论了它们各自的适用范围以及测量精度,指出两者的有机结合可以得到比较全面的分析结果。

The application of scanning electron microscopy(SEM) and transmission electronmicroscopy(TEM) in analyzing memory devices are introduced. Their applicable range and measureprecision are also discussed. We can get a comprehensive result in the memory microanalysis bycombining two methods.