接触式测微仪测头动态性能分析

The analysis of the dynamic performance of the probe in contact measurement

随着测量速度的提高,测微仪测头的动态性能已经成为影响测量精度的重要因素.本文通过对测头进行模型简化,就接触式动态扫描测量时测头与工件的脱离问题进行了深入的理论分析.给出了两者临界脱离时工件振动频率与传感器(测头)固有频率的理论关系,同时分析了影响理论脱离点的因素.为改善测头的动态响应性能提供了重要的理论依据.

With measurement speed increasing, the dynamic performance of the probe becomes an important factor which influences measurement precision. In this paper the model of instrument for micro-displacement test was simplified, and the detachment of probe and the work piece during contact scanning measurement was thoroughly analyzed, then the theoretical correlation between the vibration frequency of work piece and the inherent frequency of probe was also given when the work piece and the probe are separated with each other. In the meantime the factors influencing the theoretical detachment point were also analyzed, which has great dependence on improving the static and dynamic response performance of the probe.