离子束刻蚀软X射线透射光栅实验研究

Investigation of soft X-ray transmission grating made by ion beam etching technique

利用全息-离子束刻蚀方法研制出了聚酰亚胺薄膜为衬底的金软X射线透射光栅.研究了光栅制作中曝光量、显影条件和离子束刻蚀工艺等因素对光栅参数的影响,并给出了在惯性约束激光核聚变实验研究中的应用结果,

Soft X-ray gold transmission grating with polyimide membrance substrate is fabricated by holograph-ion beam etching technique. The exposure, development and etch conditions for fabricating grating are investigated and its experimental results used in inertial confinement fusion are given in this paper.