加速器束流传输的三阶象差与人工智能

BROWN'S TRANSPORT UP TO THIRD ORDER ABERRATION BY ARTIFICIAL INTELLIGENCE

K. L. Brown的束流传输理论是一个指导加速器束流传输系统设计的一阶及二阶矩阵近似理论,忽略了三阶及三阶以上的象差。最近我国发展了一个新方法,给出普遍的带电粒子光学系统任意阶象差系数的解析公式,适用于任意粒子光学系统,比如加速器、电子显微镜、集成电路暴光设备等。这个新方法,将Brown的束流传输理论扩展到三阶象差效应,并且借助于一个在IBM-PC286或386计算机上实现的Turbo-Prolog人工智能程序自动地输出所有的三阶象差系数解析公式。

Brown'sTRANSPORT is a first aud second order matrix multiplication computer program intended for the design of aeeelerator beam transport systems, negleeting the third order aberration. Recently anew method was devdeloped to derive analytically any order aberration coefficients of general eharged particle optic system, applicable to any practical systems, such as accelerators, electron mieroseopes, lithographs, ect., including those unknown systems yet to be invented.Anartifieial intelligence program in Turbo Prolog was implemented on IBM-PC 286 or 386 machine to generate automatically theanalytieal expression of any order aberration coefficients of general charged particle optiesystem. Based on this new method and teehniqne, Brown's TRANSPORT is extended beyond the second order aberration effect by artifieal intelligence, outputing automatically all the analytical expressions up to the third order aberration coefficients