摘要
应用氧离子注入 (Separation by Implantation of Oxygen) SIMOX技术 ,制作适合于高温环境条件下的固态压阻式硅隔离 (SOI)压力敏感元件。采用了一种新型梁膜结合封装工艺 ,有效地解决了被测压力高温冲击问题 ,可应用于航空、航天发动机等恶劣环境下的压力测量。
The SIMOX(separation by implantation of oxygen) technology has been adopted for developing the piezoresistive SOI sensitive element which is used in the high temperature circumstance. The high temperature impact of the pressure has been solved effectively by a new type of the combined beam-film encapsulation process. The kind of high temperature pressure transducer can be used in checking and measuring the pressure of engines in spaceflight or aviation under harsh environment, and so on.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2004年第2期149-151,共3页
Chinese Journal of Scientific Instrument
基金
国家 8 63计划 MEMS预启动基金项目 (10 1- 0 1)
国家 863计划 MEMS重大专项资助 (2 0 0 2 AA40 44 70 )
