摘要
利用付里叶变换红外(FTIR)光谱仪和X射线激发的CKLL俄歇电子谱的一次微分表征了类金刚石(DLC)膜的微结构。指出在高离子轰击能量和低CH_4压强下,射频等离子体沉积所制得的DLC膜具有好的热稳定性,膜内主要以sp^3 C-C键为主,折射率(红外)、光学带隙几乎为常数。
Microstructure of diamondlike carbon (DLC) films werecharacterized by using Fourier transform IR spectroscopy and CKLLfirst-derivative X-ray excited Auger electron spectra. Examinations in-dicate that DLC films prepared via rf-plasma deposition under high ionbombardment energy and low CH_4 pressure have good thermal stabili-ty,and sp^3 C-C bonds in these films are dominate,and refractive index(IR),optical gap are almost constant.
关键词
表面分析
类金刚石碳膜
微结构
surface analysis
rf plasma deposition
DLC film
