摘要
采用快电子和重粒子(N+2,N+,Nf)混合的Monte Carlo模型,研究了氮直流辉光放电等离子体金属表面氮化过程中.e N2s及N+2 N2s两种碰撞离解过程产生的原子态粒子(N+,N)的产生率和氮化粒子(N+,Nf)轰击靶表面的能量、粒子数密度及入射角分布随气体温度的变化规律.结果表明,使阴极靶处活性粒子(N+,Nf)的能量高且粒子数密度大,存在一个最佳放电温度;粒子(N+,N)的产生率及在靶表面的密度数都随着放电气体温度的升高而减少;有大量中性快原子Nf在工件表面小角入射,且粒子(N+,Nf)角分布受温度的影响很小.
Based on a combination of Monte Carlo models of fast electrons and species(N^+\-2,N^+,N\-r), Creation rates of atomic species(N^+,N) and energy, density and angular distribution of species(N^+,N\-f) bombarding negative target in nitrogen dc discharge plasma-assisted nitriding of steel surface are investigated for e^-+N(2s)→N^++N\-s+2e^-及N^+\-2+N(2s)→N^++N\-s+N\-2. It is found that these is an optimum discharge temperature for the energy distribution of species(N^+,N\-f) at the cathode; creation rate and density of atomic species(N^+,N) decreases with increasing temperature at steel surface, calculated results are generally in agreement with experimental ones.
出处
《计算物理》
CSCD
北大核心
2004年第2期173-178,共6页
Chinese Journal of Computational Physics
