多弧离子镀与离子渗中影响光电温度计测温因素的研究

Analysis of Affecting Factors for Photoelectric Pyrometer in Multi-arc Ion Coating and Metal Permeating Process

在多弧离子镀和离子渗金属中影响光电温度计测量精度的因素很多，本文通过大量试验、定性和定量的研究了诸因素，得出了校对光电温度计的线性回归方程。在实际测量中，取ε＝０．２能较准确地测量出工件的真实温度。受弧光亮度的影响。光电温度计的指示值高出工件温度６５～７０℃。对于渗 Ｔｉ和渗１Ｃｒ１８Ｎｉ９Ｔｉ的工件表面，其辐射性能相似。对于镀ＴｉＮ和渗Ｔｉ的工件表面利用光电温度计测温时，其指示值相差５℃。透过光学石英玻璃测量时，光电温度计指示值比工件低１７℃，而透过普通玻璃测量时，其指示值比工件温度低６５～８０℃。

There are many factors which affect measuring accuracy of photoelectric pyrometer when it works in multi-arc ion coating and metal permeating process. In this paper, upon quantity tests,we've analysed these factors in both qualitative and quantitative way, picking up a linear regression equation for photoelectric pyrometer's rectification. In practice, let ε=0.2, a relative accurate temperature of workpices can be obtained. Usually, the figure showed in photoelectric pyrometer is 65-70℃ higher than real one on the surface of workpices under the influnce of the arc brightness. Compare the workpieces surface during Ti and 1Cr18Ni9Ti permeating process, the radiation performances are similiar. In the process of TiN coating and Ti permeating, the difference between the temperature measured by photoelectric pyrometer and that of the workpieces is only 5℃. The value of photoelectric pyrometer measured through optical silex glass is 17℃ lower than real one which through common glass, the value will be 65-80℃ even lower.