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微机电系统集成设计方法与实现技术 被引量:11

Integrated Design Method for MEMS with Realization Technology
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摘要 针对微机电系统设计所存在的多学科交叉、周期长等问题 ,提出自顶向下设计与自底向上修正的双向微机电系统集成设计方法 ,将设计流程分为系统级、器件级和工艺级三个阶层 ;以微惯性器件为典型对象研究了各阶层的关键实现技术 ,并在此基础上构建微机电系统集成设计平台 ;所进行的硅微加速度计设计实例说明平台的设计流程可行 ,同时平台所具有的系统级。 An integrated design methodology based on top-down design and bottom-up verification was proposed to solve the challenges in MEMS design such as multi-disciplinary design and long design period, where the methodology divided the MEMS design into three levels: system, device and process level. The key realization technologies involved were presented in the case of the inertial MEMS device. An integrated design platform MEMS Garden V3.0 was built with the technologies. The successful sample design of micro accelerometer under the platform proved the feasibility of the methodology. The platform's features such as parameter-driven design in every level and custom entrances for user facilitate the design and enhance the efficiency.
出处 《中国机械工程》 EI CAS CSCD 北大核心 2004年第10期916-920,共5页 China Mechanical Engineering
基金 国家自然科学基金资助项目 ( 5 0 3 75 12 5 /5 0 2 0 5 0 2 2 ) 国家 863高技术研究发展计划资助项目 ( 2 0 0 3AA40 40 17)
关键词 微机电系统 集成设计 设计平台 系统级 器件级 工艺级 MEMS integrated design platform system level device level process level
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参考文献8

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