摘要
应用光力学效应的非制冷红外焦平面阵列(FocalPlaneArray-FPA),配有可见光读出部分的红外成像系统,可以在8至14μm光谱区得到热物体成像。其核心部件是双材料悬臂梁结构的焦平面阵列。不同于利用其他效应的非制冷红外成像系统,此种成像系统可以方便的在室温下正常工作,而且省去了相当复杂的信号转换电路,降低了制备复杂程度和成本。采用MEMS表面硅工艺制备FPA,深入研究了双材料悬臂梁结构成像系统的基本原理、光学读出系统、工艺制备难点,并得到了高温物体红外源的成像响应结果。
An optomechanical uncooled infrared(IR) imaging system consisting of a focal-plane array(FPA) based on bi-material cantilevers,with a visible optical readout system,may receive an IR imaging in the spectral range from 8 to 14μm.The uncooled micro-optomechanical IR imaging system can be availably operated at room temperature,without complicated signal readout circuits and fabrication costs.In the paper the principle of the uncooled infrared imaging system based on bi-material cantilever pixels,the optical readout system are illuminated,then the fabrication process of FPA and some experiment results are introduced.
出处
《激光与红外》
CAS
CSCD
北大核心
2004年第2期83-86,共4页
Laser & Infrared
