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基于MEMS技术的微流体混合器及相关技术 被引量：2

Microfluidic mixer based on MEMS and related technologies
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摘要 介绍了基于MEMS技术的微流体混合器及相关技术,给出了各种微流体混合器的结构、原理和特点,同时对微管道中流体混合的仿真、实验技术以及微管道中微量流体混合程度的评价方法等作了概述。 Microfluidic mixer based on MEMS technology is introduced,mainly consisting of the structure,principle,characteristics of many types of micromixers. Additionally,the related technologies such as simulation,experiment technologies and the evaluating methods of the mixing extent of liquid in microchannel are summarized.
作者 孙长敬 褚家如
机构地区 中国科技大学精密机械与精密仪器系
出处 《微纳电子技术》 CAS 2004年第5期28-32,共5页 Micronanoelectronic Technology
关键词 微机电系统 微流体系统 微流体混合器 微流体粒子图像测速 MEMS microfluidic system micromixer micro PIV
分类号 TH-39 [机械工程] TN405 [电子电信—微电子学与固体电子学]
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参考文献15

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二级参考文献15

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二级引证文献12

微纳电子技术
2004年 第5期

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