摘要
阐述了100nm步进扫描投影光刻机工件台、掩模台的功能与构成,并通过对国内外100nm步进扫描投影光刻机工件台、掩模台的技术现状的分析,总结出了100nm步进扫描投影光刻机工件台、掩模台所包含的各项关键技术,为100nm步进扫描投影光刻机工件台、掩模台的研制奠定了基础。
The paper describes the functions and structures of the workpiece table and mask table of 100nm step scanning projection photographic machine. On analysis of the current status of the same machines at home and abroad,the paper summaries some key parameters,providing a foundation for the development of the 100nm step scanning projection photographic machines.
出处
《光机电信息》
2004年第5期20-24,共5页
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