MIM有源薄膜器件及阵列的基础研究

Fundamental Research on MIM Active Thin Film Devices and Matrix

本文详细分析了MIM有源薄膜器件及阵列的工作原理、工艺过程和器件性能.根据一种液晶有源薄膜器件阵列设计模型,设计和研制出了MIM单管性能和实验用7×5象素MIM有源矩阵液晶显示板.此显示板具有显示一定图形的功能.

In the paper, the operation principles, the technological processes and the performance of MIM active thin film devices and their matrix are analysed. Based on a design model of active thin film devices and their matrix for AM-LCDs, a MIM device and a 7×5 pixel experimental panel of MIM AM-LCDs are designed and fabricated.