摘要
本文通过对液晶显示用α-Si TFT 的工作原理、工作特性分析,讨论了α-Si TFT 有源矩阵结构设计和汇线电阻、电容对α-Si TFT-LCD 的影响。介绍了α-Si TFT 有源矩阵的制作工艺。
In this paper,the principle and characteristics of α-Si TFT for LCDs are
described,and then both the structure design of α-Si TFT active matrix and the influence
of resistances and capacitances of the bus lines on LCDs are discussed.Finally,the fabri-
cation process of α-Si TFT active matrix is introduced.
出处
《光电子技术》
CAS
1992年第3期217-225,共9页
Optoelectronic Technology
关键词
有源矩阵
TFT
LCD
液晶
显示器
active matrix
thin flim transistor
liquid crystal display
