摘要
微通道板 (MCP)离子阻挡膜在Ⅲ代微光像管中起到延长寿命的关键作用 .分析了目前离子阻挡膜制备方法的优缺点 ,提出一种在MCP输入面制备离子阻挡膜的新型工艺 ,此工艺不造成MCP通道壁内表面碳污染 .在MCP输入面制备了 4nm厚Al2 O3 离子阻挡膜 ,测量了MCP离子阻挡膜的离子阻挡特性和电子透过特性 .实验表明 ,4nm厚Al2 O3 离子阻挡膜能有效地阻止反馈离子 ,透过电子 .
The ion barrier film at the input of the microchannel plate(MCP) plays an important role in improving the lifetime of the third generation image tube.The advantages and disadvantages of existing ion barrier films are analyzed, and a novel ion barrier film causing no carbon contamination in inner channel surface is proposed.A 4nm thick Al 2O 3 ion barrier film at the input of MCP is fabricated.Theion barrier and electron transmission effectiveness of ion barrier film at theinput of MCP are measured.Results of the experiment show that a 4nm thick Al 2O 3 ion barrier film is characterized by ion feedback prevention and high electron transmission.
出处
《电子学报》
EI
CAS
CSCD
北大核心
2004年第6期1023-1025,共3页
Acta Electronica Sinica
基金
国防科技重点项目资助课题 (No .2 .2 .3 .1 )
关键词
微通道板
离子阻挡膜
像管
microchannel plate
ion barrier film
image tube
