摘要
研究了敏感元材料锆钛酸铅(PZT)铁电薄膜的制备、结构和性能,并采用半导体光刻工艺和化学腐蚀的方法成功地对PZT铁电薄膜进行了刻蚀,同时采用剥离技术对相应的电极实现了图形化。该研究为铁电薄膜在热释电红外探测器中的应用奠定了基础。
Recently, pyroelectric IR sensor has received a great deal of attention in IR imaging field, because of its broad spectrum response and uncooling properties. A critical component in the pyroelectric IR sensor is the sense organ, which consists of the ferroelectric thin film in a certain shape and its up-down electrodes. In this paper, the preparation, structure and electric properties of the sensor materials were studied. Through semiconductor lithograph arts, the ferroelectric thin films was micropattered successfully by the chemical etch and the electrodes were shaped by lift-off techniques.This study is very important for the application of ferroelectric thin films in IR sensor.
出处
《太原理工大学学报》
CAS
2004年第4期388-391,共4页
Journal of Taiyuan University of Technology
基金
国家重点基础研究发展计划资助项目(2002CB613304)
上海市重点学科建设资助项目。
关键词
热释电探测器
敏感元
光刻
剥离
pyroelectric IR sensor
sense organ
lithograph
lift-off
