二级减压气体流量精确控制方法

The exploration of precise control over pneumatic flew capacity

对气体流量进行精确控制 ,仅采用流量控制阀控制时 ,流量的精度、稳定性很难保证。本文通过对气体流量方程进行理论分析 ,认为只有对节流阀两端压力差进行精确控制 ,才能保证流量控制精度 ,并介绍了精确控制的主要方法—二级减压控制法。

It is difficult to control the preciseness and stability of the air flew by flew-control valve. This article analyses the ways of air flew theoretically, and concludes that the preciseness of air flew can be obtained only by precise control pressure difference between flew-control valves. The paper also introduces the main method of precise control way -control-second class relief way.