ZnO薄膜发光特性的研究

Study on luminescence characteristics in ZnO thin film

为了研究全色显示中的蓝光问题,用电子束蒸发的方法生长了ZnO薄膜,不同温度对ZnO膜进行退火处理结果表明:退火对电致发光的影响比对光致发光更明显,O2气氛中高温退火样品的发光强度不如低温退火样品,合适的退火温度和退火气氛可以改善ZnO膜薄的结晶状态,使电致发光显著蓝移。

In order to study the problem in which blue thin film electroluminescence is not bright enough for full color display, ZnO thin film is made by using electronic beam evaporation, then it is annealed with different temperature. It is found that the annealing influence is more severe to electroluminescence than the photoluminescence. The luminescence intensity of the thin film that is annealed at low temperature is stronger than it is in high temperature in oxygen. The proper annealing temperature and medium can ameliorate crystal state of ZnO thin film, and it makes the electroluminescence spectrum shift to blue band.