RF-PCVD法纳米TiO_2的制备及光催化研究

Preparation of Nano-TiO_2 Powders by RF-Plasma CVD

采用RF-PCVD法,以TiCl4 + O2为反应体系,制备出纳米级的TiO2粉体。经TEM,XRD及粒度分布仪测试表明:粉体呈近球形,为锐钛矿型和金红石型的混晶体,粒径范围为15 nm^45 nm,团聚后,粒径≤116 nm的粉体占90%,并对纳米粉体的形成、分布和晶型进行了初步探讨。苯酚降解实验表明,TiO2粉体具有明显的光催化活性。

Nano-TiO2 powders were prepared from titanium tetrachloride and oxygen using radio-frequency plasma chemical vapor deposition method (RF-Plasma CVD). The powder products were characterized by transmission electron microscopy (TEM), X-ray diffraction (XRD) and particle size distribution tester. The measuring results show that the particles are approximately spherical, the particle size is in the range of 15 nmsimilar to45 nm, the ratio of aggregated powders in which the aggregate size is less than 116 nm is 90%. The crystal structure of the particles is the mix type of anatase and rutile. As the feeding temperature of TiCl4 is maintained to be 140degreesC, the rutile mass fraction of powders is 16.4%. The formation mechanism of the powders has been briefly discussed. As photo-catalyst to phenol solution decomposition the catalytic activity of the powders is substantial.