摘要
采用聚合物前驱体法制备铌酸锶钡(SrxBa1-xNb2O6,SBN)铁电薄膜.以柠檬酸为配位剂与金属离子配合,水作为溶剂,用乙二醇加速溶液聚合形成稳定的前驱体溶胶.采用旋转法在Si/SiO2/Ti/Pt基片上镀膜.研究了柠檬酸(CA)/乙二醇(EG)(质量比)、pH值对前驱体溶胶稳定性的影响.结果表明,当Sr-Ba-Nb前驱体溶胶的pH值为7,CA/EG=40:60时,可以获得稳定性好的溶胶.薄膜经750℃热处理,可以获得单相、表面均匀、无裂纹的铌酸锶钡铁电薄膜.
In this work, the polymeric precursor method was used to synthesize Sr_xBa_(1-x)Nb_2O_6 (SBN) thin films. Citric acid was used as the chelating agent to combine with the cations. Water was used as the solvent and ethylene alcohol was used to promote the polymerization degree of the solution. The effects of CA/EG and pH value on the stability of the precursor sol were investigated. The results showed that a homogeneous Sr-Ba-Nb precursor sol was formed at pH=7 and the optimum mass ratio of citric acid and ethylene alcohol is 40:60. By spin coating on the Si/SiO_2/Ti/Pt substrate and annealing at 750℃, single phased SBN thin films with smooth and crack-free surface were prepared.
出处
《材料科学与工艺》
EI
CAS
CSCD
2004年第2期132-135,共4页
Materials Science and Technology
基金
国家自然科学基金资助项目(50232030).
