MOCVD系统生长过程的优化精确控制

PRECISE CONTROL OF THE GROWTH PROCESS ABOUT MOCVD SYSTEM

通过对TurboDiscMOCVD设备系统以及部件工作原理的研究,提出了多种对典型器件生产工艺的调整方案,如压力流量的调整,质量流量计(MFC)工作曲线的完善,主动进气补偿等等,实现了MOCVD生长系统生长过程的自动精确控制.并对设备提出了改进意见.

After being researched into the running process of Turbo-Disc MOCVD system and the working principle of parts,the adjusted growth processes have been proposed. We have realized the automatically precise control to the growth progress of the MOCVD system,for example,the adjustment scheme concerning to the pressure and flow,the completeness of the MFCworking curve and the active flowcompensation,etc. And the improvement to the system was put forward.