摘要
就动态指数衰减法校准B-A规的原理作了分析论证。设计校准系统时考虑了散流室、校准室的形状及有关参量,系统的整体构成以及气体分子的实际分布。并就热阴极电离规的校准结果和误差进行了讨论。校准系统使用氦循环低温泵及钛升华泵获10^(-8)～10^(-9)Pa超高真空,校准范围达10^(-2)～10^(-7)Pa,误差为6.5％。
The principle of the dynamic exponential-decreasing method for vacuum gauge calibration is discussed. A calibration system based on this principle has been set up with choosing the optimum shapes and parameters of scatter-chamber and calibration chamber in line with the practical distribution of gas molecular. By a combination of helium-cycle cryopump and titanium sublimation pump to obtain 10^(-8)～10^(-9)Pa UHV, B-A gauge vs N_2 between 10^(-2)～10^(-7) Pa has been calibrated with an error of 6.5%.
出处
《暨南大学学报（自然科学与医学版）》
CAS
CSCD
1992年第1期40-46,共7页
Journal of Jinan University(Natural Science & Medicine Edition)
基金
1988~1990年国家自然科学基金
