摘要
以正方形单胞为例,较系统的分析了VDMOSFET的物理机制及其工作原理,并通过大量计算找出多晶硅窗口区尺寸Lw和多晶硅尺寸Lp的最佳设计比例,阐述了器件的最佳化设计思想.
The physical machine-processed and working principle of VDMOSFET is analyzed systematically on the basis of a square cell. Optimally scaled design of the size of poly-window Pw and the size of poly-length PT through large number calculation are found out. The best design idea of the device is stated.
出处
《辽宁大学学报(自然科学版)》
CAS
2004年第1期27-30,共4页
Journal of Liaoning University:Natural Sciences Edition