小波变换及其在MEMS谐振器运动轨迹的特征提取中的应用

Wavelet transform and its application in extraction of micro-resonator motion track features

为测量微电机械系统(MEMS)谐振器的动态特性参数,根据MEMS谐振器运动图像的特点,将小波变换应用于MEMS谐振器运动轨迹的特征提取中。基于模糊图像合成技术,利用小波变换对MEMS谐振器的模糊运动图像进行了增强及降噪处理,并结合传统的图像处理方法,提取MEMS谐振器的运动轨迹,最终获得了MEMS谐振器的特性参数,从而可为MEMS器件的设计提供重要参考。实验结果表明,利用小波变换的方法获得了更好的测量精度,测量重复性误差为100nm。

According to the characteristics of micro-resonator motion images, wavelet transform is used to extract the micro-resonator motion track features. Based on the blur image synthetic technique, wavelet transform was applied to enhance and abate noise of blur micro-resonator motion images, while the traditional image processing method is used to extract the motion track features, and finally the natural parameter of micro-resonator was acquired as important reference for MEMS design. In comparison with traditional image processing method, wavelet transform method has better measurement resolution, and its measurement repetition error is 100 nm.