高质量非规整多层膜自动制备的研究

High performance irregular multi-layer coating machine

为解决专门制备DWDM薄膜滤光片的LeyboldAPS1104DWDM镀膜机制备包含几十层膜层的非规整膜系存在一定困难的问题,分析了非规整膜系光控曲线中关键区产生的原因,认为这是触发点位置与非理想环境因素共同作用造成触发点漂移产生的结果。误差校正功能的实现与监控曲线的走值趋势密切相关,曲线必须存在理论触发点和至少一个拐点。实验结果表明,采用准规整膜系设计方法能有效避免关键区的危害,同时充分发挥误差校正的功能。利用该镀膜机在精度、灵敏度和算法等方面的优势,设计出了与其配套的膜系,成功地制备了各种高性能薄膜滤光片。

Leybold APS 1104 DWDM is a coating machine specially designed for coating DWDM thin film filter, and it has the difficulty in coating non-QWOT films consisting of multi-decades layers. Through in depth analysis of its characteristics, some design methods are suggested for coating QWOT film. By using these methods, coating high performance thin film filters is finally achieved.