材质气孔率和气孔大小与表面粗糙度的数学模拟与特征

Numerical simulation and characterization of materials' porosity, pore size, and surface roughness

为提高光学系统的成像质量,研究了光学系统中镜片表面粗糙度与镜片材质中的颗粒大小、缺陷、气孔率、气孔大小的关系。通过几何方法,建立了气孔率与气孔大小和数量的关系模型,分别给出了单位体积和单位面积中气孔率与气孔大小和数量的关系表达式。最后用数学方法建立了材质中气孔率、气孔大小与表面粗糙度的定量模型,给出了表面粗糙度与材质气孔率和气孔大小的关系表达式,表明表面粗糙度近似与材质中的气孔率成正比,与气孔大小成正比。

The surface roughness of mirrors determine the quality of imaging in an optical system, and it depends on the optical processes and the characteristics of material itself, for example, the grain size, flaws, porosity and pore size of materials have great effect on the surface roughness. Therefore, a model was built by geometry method for the relationship between porosity ρ and pore size d, the function relationships among number of pores N_V or N_S are described. Another model used to simulate the effect of porosity and pore size on surface roughness R_A was constructed by mathematical method. The dependence of R_A on ρ and d is given.