悬臂式微型加速度传感器的动态特性分析

Dynamic States Specific Analysis for Cantilever Microaccelerometers

用模态分析的理论和方法对悬臂式微型加速度传感器进行了动态特性分析,给出了满足结构强度和刚度条件的工作梁表面动应力的分布规律及数值,并给出了控制结构安全工作的阻尼比;使传感器的结构设计趋于合理.

This paper uses the theory and method of modal analysis for dynamic states specific analyzing on cantilever micro accelerometers according to strength and stiffness of structure, giving numerical value and distributed law of working beam surface dynamic stress. Then gives damp ratio of controlling structure working safely, which makes design of structure of micro accelerometers more rational.