摘要
介绍了一种能在 2 0K～ 30 0K温度范围内对电涡流式位移传感器进行静态标定的系统 ,着重分析了该系统的温度及位移误差 ,并对传感器进行了 2 0K ,90K的标定实验。该标定系统具有多通道数据采集与处理、自动温控、观察窗可视操作等特点 ,工作区温控精度优于± 1K ,位移给定精度0 0 0 1mm。经适当改进后还可对其它原理位移传感器进行低温标定。
A calibration system for the static calibration of eddy current displacement sensor which works in a temperature range from 20 K to 300 K is presented in the paper. The errors of temperature and displacement of the system are emphatically analyzed and experiments of calibrating have been done at 20 K and 90 K. This calibration system has many characteristics such as multi-channel data acquisition and processing, automatic temperature control and window visual operating. In working field, the temperature control accuracy is within ±1K and the given displacement accuracy is 1 micron. The presented system can provide a reference measurement for calibrating other displacement sensors based on other theories at low temperature by some improvement.
出处
《低温工程》
CAS
CSCD
北大核心
2004年第2期41-44,共4页
Cryogenics
